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Cite this article as: Xin Hua,Bai Wei,Du Qi-Fan,Yang Le,Li Zhi-Qiao,Liu Hong-Yu. Plasma-Based Particle Generators for Producing Particles from Single Atoms and Clusters to Nanoparticles [J]. J. At. Mol. Phys.(原子与分子物理学报), 2026, 43: 053001 (in Chinese)
Plasma-Based Particle Generators for Producing Particles from Single Atoms and Clusters to Nanoparticles
Hits 241  Download times 4  Received:February 05, 2025  Revised:February 26, 2025
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DOI   10.19855/j.1000-0364.2026.053001
Key Words   atomic clusters  nanoparticles  plasmas  particle synthesis  glow sputtering  spark discharge
Author NameAffiliationE-mail
Xin Hua Shaanxi University of Science & Technology xinhuajd@sust.edu.cn 
Bai Wei Shaanxi University of Science & Technology 871580561@qq.com 
Du Qi-Fan Shaanxi University of Science & Technology 15893870947@163.com 
Yang Le Shaanxi University of Science & Technology yl18729472496@163.com 
Li Zhi-Qiao Shaanxi University of Science & Technology qiaoyi1314@126.com 
Liu Hong-Yu* Shenzhen Creatom Technology Co, Ltd hongyu.liu2019@outlook.com 
Abstract
    Atomic clusters and nanoparticles have exhibited numerous distinctive characteristics and application prospects in various fields, particularly in catalysis. The spark discharge generator (SDG) is a miniaturized device capable of generating nanoparticles through plasma at normal temperature and pressure. However, there are scarce reports on its application potential in generating atomic clusters at present. This paper focuses on the investigation of the particle generator based on the SDG configuration, the ability to produce single atoms and clusters at low current using glow sputtering, and the influence of parameters. A current of 100 mA is selected for the research to explore the effects of different gas flow rates and collection distances on the particle size of the generated cluster particles. The products are characterized using scanning transmission electron microscopy and the particle size distribution is statistically analyzed. The results indicate that the plasma plume at low current can generate single atoms and sub-nanometer cluster particles. With the increase in gas flow rate, the average particle size of the generated particles decreases. As the collection distance increases, the average particle size of the obtained particles increases. At high current, it can generate nanocrystalline particle aggregates through spark ablation, following the same gas flow rate rule as at low current. Therefore, this configuration of the particle generator can essentially generate particles ranging from single atoms and clusters to nanoparticles by regulating the current, and control the particle size distribution of the obtained particles by adjusting factors such as gas flow rate and collection distance.

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